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You are here: Home / Permitting / Air Permits / New Source Review / Best Available Control Technology (BACT) / Best Available Control Technology (BACT) Guidelines for the Semiconductor Industry

Best Available Control Technology (BACT) Guidelines for the Semiconductor Industry

This table provides information regarding Threshold Limits.
Emission StreamThreshold LimitRemoval MechanismDesign CriteriaReliability
Nonhalogenated organic compounds > 50 TPY Oxidation 95 percent D.R.E.
of the target compound at highest expected inlet concentration
OR
20 ppmv or less in exhaust (total of all nonhalogenated organic compounds)
8592 hours per year
(off-line 1 week)
Adsorption 90 percent D.R.E.
of the target compound at highest expected inlet concentration
OR
20 ppmv or less in exhaust (total of all nonhalogenated organic compounds)
8208 hours per year
(off-line 1 week)
Halogenated Organic Compounds > 250 TPY Oxidation
and
Absorption
None proposed at this time Not Applicable
Water Soluble Inorganic Compounds > 1 TPY Absorption 99 percent R.E.
of the target compound at highest expected inlet concentration
OR
detectable limit of the target compound or less in exhaust
8592 hours per year
(off-line 1 week)

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