Best Available Control Technology (BACT) Guidelines for the Semiconductor Industry
This table provides information regarding Threshold Limits.
| Emission Stream | Threshold Limit | Removal Mechanism | Design Criteria | Reliability |
|---|---|---|---|---|
| Nonhalogenated organic compounds | > 50 TPY | Oxidation | 95 percent D.R.E. of the target compound at highest expected inlet concentration OR 20 ppmv or less in exhaust (total of all nonhalogenated organic compounds) |
8592 hours per year (off-line 1 week) |
| Adsorption | 90 percent D.R.E. of the target compound at highest expected inlet concentration OR 20 ppmv or less in exhaust (total of all nonhalogenated organic compounds) |
8208 hours per year (off-line 1 week) |
||
| Halogenated Organic Compounds | > 250 TPY | Oxidation and Absorption |
None proposed at this time | Not Applicable |
| Water Soluble Inorganic Compounds | > 1 TPY | Absorption | 99 percent R.E. of the target compound at highest expected inlet concentration OR detectable limit of the target compound or less in exhaust |
8592 hours per year (off-line 1 week) |
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