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Air PBR 106.225: Semiconductor Manufacturing

Modifications, additions, or relocations of equipment (excluding add-on controls) used for semiconductor-manufacturing operations that result in the addition, increase, or substitution of an air contaminant are permitted by rule provided the conditions of this section are satisfied.

Semiconductor manufacturing facilities must meet the specific conditions stated in in Title 30, Texas Administrative Code (30 TAC), Section 106.225 , to be permitted by rule.

To find out whether your facility meets the general conditions stated in Section 106.4, complete our PBR Applicability Checklist, Form TCEQ-10149.

To determine if your facility meets the specific requirements of PBR 106.225, complete the 106.225 Checklist, Form TCEQ-10120.

If your facility cannot comply with the conditions indicated in these checklists, see Types of New Source Review Authorizations for other options.


This PBR does not require you to register or pay a fee.

Record Keeping

Under 30 TAC Section 106.8 , your records must identify the rules under which your facility is operating and demonstrate compliance. Under this PBR, you must keep at least these records for a rolling 24-month period:

  • a copy of Section 106.4
  • a copy of Section 106.225
  • monthly usage of all liquid and solid material
  • any other records necessary to demonstrate compliance with the conditions of this PBR

These records must be kept on-site and readily available on request for inspection by the TCEQ or any air-pollution-control program that has jurisdiction. If you have questions about the type of records you should keep, contact the Air Program in the TCEQ regional office that serves your county.

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